Web@article{osti_6411793, title = {Dyed resist for the reduction of reflective notching}, author = {Renschler, C L}, abstractNote = {Optical patterning, or the projection of light through a mask to expose a photosensitive underlayer, is used in the fabrication of a wide variety of products. The range of these pattern dimensions can run from large decorative displays, … WebFeb 1, 1988 · This article describes the use of heavily dyed photoresist in patterning wafers in production. The dyed resist is made by adding the commercially available …
Dispelling the Myths about Dyed Photoresist - Semantic …
WebLiquid Photoresist EmulsionSBX liquid resist emulsion is a product which can be blade-coated or sprayed directly on a variety of surfaces for general and detailed imaging … WebThe types of photoresists are classified by their physical constitution (liquid, dry film), radiation response (x ray, e-beam, and UV), mode of operation (positive/negative), or … gaz bloqués colon
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WebUndyed, AZ 1512,and dyed, AZ 1512-SFD, photoresist was coated on aluminum covered oxide topography. The exposure was varied from 7OmJ/cm2 to 130m3/cm2 and the 3.Oum line/space pairs were measured to calculate the exposure latitude. The resist lines were examined over topography for signs of reflective notching. Results showed an increase … WebResist series offering robust patterning for g-line, i-line and broadband (>800 nm CD): HiPR 6500 series HPR 510 series Dyed Resists for Highly Reflective Substrates Resist series offering non-bleaching, high optical densities for CD and notching control on highly reflective substrates: OiR 906MD OiR 906HD OiR 305HC HiPR 6500GH HiPR 6500HC WebAug 20, 1986 · In modern photolithography, alignment to targets which are burried under layers of highly absorptive coatings at the actinic wavelength, is a severe problem. A novel optical technique has been developed at TRE allowing the use of an arbitrary optical wavelength for target alignment. Significant improvement in target image quality and in … australien synonym